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Jacket Heater System - メーカー・企業と製品の一覧

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Jacket heater system

PID control jacket heater for maintaining temperature uniformity in piping.

The jacket heater system is a key item for optimizing semiconductor piping. It is used for preventing the adhesion of by-products inside the piping, heating the supply gas, and heating the exhaust piping, gas supply piping, valves, equipment, and exhaust treatment device piping. 【Features】 - Capable of heating up to high temperatures of 200°C - The flexible heating element with multi-layer insulation and grounding offers high safety and durability - No cold spots, excellent temperature uniformity - A low-dust type designed for clean room applications in semiconductor equipment - Flexible, detachable, and provides a good fit - CE marked and UL certified 【Dedicated Temperature Control & Monitoring System】 - Controls and monitors the temperature of each jacket heater via communication functions - Enhances temperature uniformity with PID control for each jacket - Abnormalities are recognized immediately - Capable of monitoring 40 jacket heaters with one unit - Compact and space-saving - Reduces temperature control wiring, power supply wiring, and monitoring costs ■ Benefits of Implementation - Reduction of downtime - Lower cleaning costs - Prevention of contact accidents with equipment - Suppression of by-product scattering, improving the working environment

  • Other heaters
  • Other semiconductor manufacturing equipment
  • Temperature and Humidity Control

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